00786nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003400092245010200126260003200228300002000260490003300280856010300313942000700416999001700423952016400440IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819474520 (Print)  cIIA Library  aKullberg, Richard, ed.947461 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIIIh[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7206  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7206yClick Here to Access eBook  cEB  c31677d31677  00104070aBANbBANd2011-07-01eSPIEhV. 7206l0pEB11137r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7206w2021-11-05yEB