00553nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245010000119260003200219300002000251490003300271856010300304IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819479884 (Print)  cIIA Library  aKullberg, Richard, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IXh[eBook]  aWashington, USAbSPIEc2010  aOnline resource  aProceedings of SPIE; V. 7592  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7592yClick Here to Access eBook