Kullberg, Richard, ed. <br/><br/>
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX  [eBook] 

 - Washington, USA  SPIE  2010 
 - Online resource 
 - Proceedings of SPIE; V. 7592 .
<br/><br/><label>ISBN: </label>9780819479884 (Print)