@book{31676,
	author = {Kullberg, Richard, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7592},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7592}
}