TY  - BOOK
AU  - Singh, Rajendra, ed.
TI  - Rapid Thermal and Related Processing Techniques
T2  - Proceedings of SPIE; V. 1393
SN  - 9780819404626 (Print)
PY  - 1991///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1393
ER  -