00513nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006100117260003300178300002000211490003300231856010300264IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819404626 (Print)  cIIA Library  aSingh, Rajendra, ed. 0aRapid Thermal and Related Processing Techniquesh[eBook]  aWashington, USAbSPIEc1991   aOnline resource  aProceedings of SPIE; V. 1393  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1393yClick Here to Access eBook