@book{31564,
	author = {Singh, Rajendra, ed.},
	title = {Rapid Thermal and Related Processing Techniques},
	publisher = {SPIE},
	year = {1991 },
	series = {Proceedings of SPIE; V. 1393},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1393}
}