@book{31563,
	author = {Kwong, Dim-Lee, ed.},
	title = {Rapid Thermal and Laser Processing},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 1804},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1804}
}