TY  - BOOK
AU  - Moslehi, Mehrdad, ed.
TI  - Rapid Thermal and Integrated Processing
T2  - Proceedings of SPIE; V. 1595
SN  - 9780819407269 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1595
ER  -