00775nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245009300124260003200217300002000249490003300269856010300302942000700405999001700412952016400429IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819434791 (Print)  cIIA Library  aToprac, Anthony, ed.947272 0aProcess, Equipment, and Materials Control in Integrated Circuit Manufacturing Vh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3882  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3882yClick Here to Access eBook  cEB  c31340d31340  00104070aBANbBANd2011-07-01eSPIEhV. 3882l0pEB10800r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3882w2021-11-05yEB