TY  - BOOK
AU  - Toprac, Anthony, ed.
TI  - Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V
T2  - Proceedings of SPIE; V. 3882
SN  - 9780819434791 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3882
ER  -