00544nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245009300117260003200210300002000242490003300262856010300295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819434791 (Print)  cIIA Library  aToprac, Anthony, ed. 0aProcess, Equipment, and Materials Control in Integrated Circuit Manufacturing Vh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3882  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3882yClick Here to Access eBook