@book{31340,
	author = {Toprac, Anthony, ed.},
	title = {Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3882},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3882}
}