00776nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245009400124260003200218300002000250490003300270856010300303942000700406999001700413952016400430IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819429667 (Print)  cIIA Library  aToprac, Anthony, ed.947271 0aProcess, Equipment, and Materials Control in Integrated Circuit Manufacturing IVh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3507  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3507yClick Here to Access eBook  cEB  c31339d31339  00104070aBANbBANd2011-07-01eSPIEhV. 3507l0pEB10799r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3507w2021-11-05yEB