TY  - BOOK
AU  - Toprac, Anthony, ed.
TI  - Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
T2  - Proceedings of SPIE; V. 3507
SN  - 9780819429667 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3507
ER  -