TY  - BOOK
AU  - Ghanbari, Abe, ed.
TI  - Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III
T2  - Proceedings of SPIE; V. 3213
SN  - 9780819426451 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3213
ER  -