00544nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245009500115260003200210300002000242490003300262856010300295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819426451 (Print)  cIIA Library  aGhanbari, Abe, ed. 0aProcess, Equipment, and Materials Control in Integrated Circuit Manufacturing IIIh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3213  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3213yClick Here to Access eBook