@book{31338,
	author = {Ghanbari, Abe, ed.},
	title = {Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3213},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3213}
}