TY  - BOOK
AU  - Iturralde, Armando, ed.
TI  - Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II
T2  - Proceedings of SPIE; V. 2876
SN  - 9780819422743 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2876
ER  -