00548nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245009400120260003200214300002000246490003300266856010300299IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819422743 (Print)  cIIA Library  aIturralde, Armando, ed. 0aProcess, Equipment, and Materials Control in Integrated Circuit Manufacturing IIh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2876  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2876yClick Here to Access eBook