@book{31337,
	author = {Iturralde, Armando, ed.},
	title = {Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2876},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2876}
}