TY  - BOOK
AU  - Sabnis, Anant, ed.
TI  - Process, Equipment, and Materials Control in Integrated Circuit Manufacturing
T2  - Proceedings of SPIE; V. 2637
SN  - 9780819420039 (Print)
PY  - 1995///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2637
ER  -