@book{31336,
	author = {Sabnis, Anant, ed.},
	title = {Process, Equipment, and Materials Control in Integrated Circuit Manufacturing},
	publisher = {SPIE},
	year = {1995},
	series = {Proceedings of SPIE; V. 2637},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2637}
}