00510nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245006200114260003200176300002000208490003300228856010300261IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819407252 (Print)  cIIA Library  aDavis, Cecil, ed. 0aProcess Module Metrology, Control and Clusteringh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1594  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1594yClick Here to Access eBook