@book{31334,
	author = {Davis, Cecil, ed.},
	title = {Process Module Metrology, Control and Clustering},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1594},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1594}
}