00727nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245004500124260003200169300002000201490003300221856010300254942000700357999001700364952016400381IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819438430 (Print)  cIIA Library  aMiller, Michael, ed.947264 0aProcess Control and Diagnosticsh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 4182  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4182yClick Here to Access eBook  cEB  c31329d31329  00104070aBANbBANd2011-07-01eSPIEhV. 4182l0pEB10789r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4182w2021-11-05yEB