TY  - BOOK
AU  - Miller, Michael, ed.
TI  - Process Control and Diagnostics
T2  - Proceedings of SPIE; V. 4182
SN  - 9780819438430 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4182
ER  -