TY  - BOOK
AU  - Tobin, Kenneth, ed.
TI  - Process and Materials Characterization and Diagnostics in IC Manufacturing
T2  - Proceedings of SPIE; V. 5041
SN  - 9780819448460 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5041
ER  -