00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245008800116260003200204300002000236490003300256856010300289IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819448460 (Print)  cIIA Library  aTobin, Kenneth, ed. 0aProcess and Materials Characterization and Diagnostics in IC Manufacturingh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5041  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5041yClick Here to Access eBook