@book{31328,
	author = {Tobin, Kenneth, ed.},
	title = {Process and Materials Characterization and Diagnostics in IC Manufacturing},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5041},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5041}
}