TY  - BOOK
AU  - Fallon, Martin, ed.
TI  - Process and Equipment Control in Microelectronic Manufacturing II
T2  - Proceedings of SPIE; V. 4405
SN  - 9780819441065 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4405
ER  -