@book{31327,
	author = {Fallon, Martin, ed.},
	title = {Process and Equipment Control in Microelectronic Manufacturing II},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4405},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4405}
}