TY  - BOOK
AU  - Yallup, Kevin, ed.
TI  - Process and Equipment Control in Microelectronic Manufacturing
T2  - Proceedings of SPIE; V. 3742
SN  - 9780819432223 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3742
ER  -