TY  - BOOK
AU  - Wyant, James, ed.
TI  - Precision Surface Metrology
T2  - Proceedings of SPIE; V. 0429
SN  - 9780892524648 (Print)
PY  - 1983///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0429
ER  -