@book{31322,
	author = {Wyant, James, ed.},
	title = {Precision Surface Metrology},
	publisher = {SPIE},
	year = {1983},
	series = {Proceedings of SPIE; V. 0429},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0429}
}