00510nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003100092245005300123260003200176300002000208490003300228856010300261IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819402035 (Print)  cIIA Library  aVukobratovich, Daniel, ed. 0aPrecision Engineering and Optomechanicsh[eBook]  aWashington, USAbSPIEc1989  aOnline resource  aProceedings of SPIE; V. 1167  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1167yClick Here to Access eBook