00518nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006700117260003200184300002000216490003300236856010300269IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819461483 (Print)  cIIA Library  aGeohegan, David, ed. 0aPhoton Processing in Microelectronics and Photonics Vh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6106  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6106yClick Here to Access eBook