TY - BOOK AU - Dubowski, Jan, ed. TI - Photon Processing in Microelectronics and Photonics T2 - Proceedings of SPIE; V. 4637 SN - 9780819443762 (Print) PY - 2002/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4637 ER -