@book{30797,
	author = {Preil, Moshe, ed.},
	title = {Photomask Technology 2020},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11518},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11518}
}