TY  - BOOK
AU  - Rankin, Jed, ed.
TI  - Photomask Technology 2019
T2  - Proceedings of SPIE; V. 11148
SN  - 9781510629998 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11148
ER  -