@book{30796,
	author = {Rankin, Jed, ed.},
	title = {Photomask Technology 2019},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 11148},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11148}
}