00531nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002700119245003900146260003200185300002000217490003300237856010300270IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510603745 (Print)  a9781510603752 (Online)  cIIA Library  aKasprowicz, Bryan, ed. 0aPhotomask Technology 2016h[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9985  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9985yClick Here to Access eBook