@book{30794,
	author = {Kasprowicz, Bryan, ed.},
	title = {Photomask Technology 2016},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9985},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9985}
}