00489nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245003900116260003200155300002000187490003300207856010300240IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628418453 (Print)  cIIA Library  aHayashi, Naoya, ed. 0aPhotomask Technology 2015h[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9635  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9635yClick Here to Access eBook