@book{30793,
	author = {Hayashi, Naoya, ed.},
	title = {Photomask Technology 2015},
	publisher = {SPIE},
	year = {2015},
	series = {Proceedings of SPIE; V. 9635},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9635}
}