TY  - BOOK
AU  - Ackmann, Paul, ed.
TI  - Photomask Technology 2014
T2  - Proceedings of SPIE; V. 9235
SN  - 9781628412987 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9235
ER  -