@book{30792,
	author = {Ackmann, Paul, ed.},
	title = {Photomask Technology 2014},
	publisher = {SPIE},
	year = {2014},
	series = {Proceedings of SPIE; V. 9235},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9235}
}