TY  - BOOK
AU  - Faure, Thomas, ed.
TI  - Photomask Technology 2013
T2  - Proceedings of SPIE; V. 8880
SN  - 9780819495457 (Print)
PY  - 2013///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8880
ER  -