@book{30791,
	author = {Faure, Thomas, ed.},
	title = {Photomask Technology 2013},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8880},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8880}
}