TY  - BOOK
AU  - Abboud, Frank, ed.
TI  - Photomask Technology 2012
T2  - Proceedings of SPIE; V. 8522
SN  - 9780819492609 (Print)
PY  - 2012///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8522
ER  -